Optical Fiber
When manufacturing fiber optics, plasma torch gas control is critical to the process. HORIBA’s flow measurement and control technology is used to accurately and repeatedly control the flow rate of these gases. To create a preform, fiber optics manufacturers can use POCl3, SiCl4 and GeCl4 delivered via a bubbler system or hotbox. Precise and repeatable control of the vaporization process is contingent on the precise operation of the bubbler / hotbox and tight control of the carrier gas.
HORIBA’s flagship SEC-Z500X series which can control flows up to 500slm, combined with our high temperatureSEC-8000 series MFC are the perfect solution for accurate flow control of these critical process gases.
Related Products
Below you can see the different stages during the Optical Fiber production process. Please click on each phase in order to see the products that are avaialble to you during this stage.
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.
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Baking System
Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.
Injection System
We can offer custom-made solutions consisting of the folowing components. Please contact us with your requests.
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.
Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.
Bubbling System
We can offer custom-made solutions consisting of the folowing components. Please contact us with your requests.
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.
High senility in-line gas monitor of SiF4 and CF4 for chamber cleaning end point monitoring in deposition process. Reduce clean time and gas usage by real-time monitoring.
In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.
HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3. This Auto Refill System achieves higher uptime, cost reduction, improved process stability and higher safety.
Liquid Source Auto Refill System
HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3. This Auto Refill System achieves higher uptime, cost reduction, improved process stability and higher safety.
Automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.