Gas Monitor / Vacuum Monitor
HORIBA has various types of gas monitors, vacuum monitors and analysers for use with residual gas analyzation.
We offer the ultra-compact Gas Monitor which has nine quadrupoles in arrays for residual gas analysing. These are optimal for process control or analysis in a vacuum chamber.
We also have the Capacitance Manometer which is compact, all metal and has a self-temperature adjustment function as well as a capacitance diaphragm gagen.
Our Vapor Concentration Monitor (IR-300) is reliable, high performing and non-dispersive infrered Absorptiometry (NDIR).
Compact Process Gas Monitor
Compact process gas monitor using quadrupole mass spectrometer. Monitors trace gases, responds quickly to process shift . Easy to install and maintain.
Capacitance Manometer
Gas Concentration Monitor
High senility in-line gas monitor of SiF4 and CF4 for chamber cleaning end point monitoring in deposition process. Reduce clean time and gas usage by real-time monitoring.
In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.